Kafukufuku wofufuza Yang Liang ku bungwe la Suzhou Institute for Advanced Study ku University of Science and Technology of China adapanga njira yatsopano yopangira zitsulo zachitsulo za oxide semiconductor laser yaying'ono-nano, zomwe zidazindikira kusindikiza kwa laser kwa ZnO semiconductor mwatsatanetsatane, ndikuphatikizana. ndi makina osindikizira achitsulo a laser, kwa nthawi yoyamba anatsimikizira kulembedwa kwachindunji kwa laser kwa zigawo za microelectronic ndi mabwalo monga ma diode, triodes, memristors ndi ma circuit encryption, motero kupititsa patsogolo zochitika zogwiritsira ntchito laser micro-nano processing kumunda wa microelectronics, mu zamagetsi zosinthika, masensa apamwamba, Intelligent MEMS ndi magawo ena ali ndi chiyembekezo chofunikira chogwiritsa ntchito. Zotsatira za kafukufuku zidasindikizidwa posachedwa mu "Nature Communications" pansi pa mutu wakuti "Laser Printed Microelectronics".
Zamagetsi zosindikizidwa ndiukadaulo womwe ukubwera womwe umagwiritsa ntchito njira zosindikizira kupanga zinthu zamagetsi. Imakwaniritsa mawonekedwe a kusinthasintha ndi makonda a m'badwo watsopano wa zinthu zamagetsi, ndipo idzabweretsa kusintha kwatsopano kwaukadaulo kumakampani a microelectronics. Pazaka 20 zapitazi, makina osindikizira a inkjet, laser-induced transfer (LIFT), kapena njira zina zosindikizira zapita patsogolo kwambiri kuti athe kupanga zida zogwirira ntchito za organic ndi inorganic microelectronic popanda kufunikira kwa malo oyeretsa. Komabe, kukula kwake kwa njira zosindikizira zomwe zili pamwambazi nthawi zambiri zimakhala pa ma microns makumi ambiri, ndipo nthawi zambiri zimafuna kuti pakhale kutentha kwambiri pambuyo pokonza, kapena zimadalira njira zingapo kuti zitheke kukonza zida zogwirira ntchito. Ukadaulo waukadaulo wa Laser Micro-nano umagwiritsa ntchito kuyanjana kosagwirizana pakati pa ma pulses ndi zida za laser, ndipo imatha kukwaniritsa zovuta zogwirira ntchito komanso kupanga zida zowonjezera zomwe zimakhala zovuta kuzikwaniritsa ndi njira zachikhalidwe molunjika <100 nm. Komabe, zida zambiri zamakono zopangidwa ndi laser zazing'ono-nano ndi zida za polima imodzi kapena zida zachitsulo. Kuperewera kwa njira zolembera za laser mwachindunji kwa zida za semiconductor kumapangitsanso kuti zikhale zovuta kukulitsa kugwiritsa ntchito ukadaulo wa laser micro-nano kumunda wa zida za microelectronic.
Munthano iyi, wofufuza Yang Liang, mogwirizana ndi ofufuza ku Germany ndi Australia, adapanga mwanzeru kusindikiza kwa laser ngati ukadaulo wosindikiza wa zida zamagetsi zamagetsi, kuzindikira semiconductor (ZnO) ndi conductor (Kusindikiza kwa laser kwazinthu zosiyanasiyana monga Pt ndi Ag) (Chithunzi 1), ndipo sichifuna masitepe aliwonse otenthetsera pambuyo pokonza, ndipo kukula kwake kochepa ndi <1 µm. Kupambana kumeneku kumapangitsa kuti zitheke kusintha mapangidwe ndi kusindikiza kwa ma kondakitala, ma semiconductors, ngakhalenso masanjidwe a zida zotchingira molingana ndi magwiridwe antchito a zida za microelectronic, zomwe zimathandizira kwambiri kulondola, kusinthasintha, komanso kuwongolera kwa makina osindikizira a microelectronic. Pazifukwa izi, gulu lofufuza lidazindikira bwino kulemba kwachindunji kwa laser kwa ma diode, ma memristors ndi mabwalo osapangananso obisika (Chithunzi 2). luso imeneyi n'zogwirizana ndi miyambo inkjet kusindikiza ndi umisiri zina, ndipo akuyembekezeka anawonjezera kwa kusindikiza zosiyanasiyana P-mtundu ndi N-mtundu semiconductor zitsulo okusayidi zipangizo, kupereka mwadongosolo njira yatsopano kwa processing wa zovuta, zazikulu, zipangizo zitatu-dimensional zikugwira ntchito microelectronic.
MalingaliroChithunzi: https://www.nature.com/articles/s41467-023-36722-7
Nthawi yotumiza: Mar-09-2023